Excimer
Laser Optromix Optromix CLS-5000, 193 nm, Max. Pulse Energy up to 15 mJ
Excimer
Laser Optromix Optromix CLS-5000, 248 nm, Max. Pulse Energy up to 25 mJ
Excimer
Laser Optromix Optromix CLS-5000, 308 nm, Max. Pulse Energy up to 12 mJ Excimer
Laser Optromix Optromix CL-7000, 193 nm, Max. Pulse Energy up to 250 mJ
Excimer
Laser Optromix Optromix CL-7000, 248 nm, Max. Pulse Energy up to 400 mJ
Excimer
Laser Optromix Optromix CL-7000, 308 nm, Max. Pulse Energy up to 300 mJ
Narrow
Linewidth Excimer Laser Optromix Optromix CL-7500, 193 nm, Nom. Pulse Energy up
to 100 mJ
Narrow
Linewidth Excimer Laser Optromix Optromix CL-7500, 248 nm, Nom. Pulse Energy up
to 250 mJ